年度87
論文名稱Three x-ray mask-making methods applied for LIGA process
會議名稱Proceedings of SPIE on photomask and x-ray mask technology VI. SPIE, v.3748, SPIE-the international society for optical engineering, pp.495-502
會議開始時間1999-04-01
全部作者Yang, Hsiharng; 康尚文; Kang, Shung-wen; Chou, Min-Chieh
備註會議論文