年度90
論文名稱Photo-patternable gelatin as protection layers in surface micromachinings
會議名稱Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
會議開始時間2002-01-20
全部作者Yang, Lung-jieh; Lin, Wei-zhi; Yao, Tze-jung; Tai, Yu-chong
備註會議論文