年度91
論文名稱In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor
會議名稱Proceedings of the 2003 IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, pp.993-1000
會議開始時間2003-05-04
全部作者Lee, Chi-yuan; Lee, Chi-yuan; Wu, Tsung-tsong; Chen, Yung-yu; Pao, Shih-yung; Chen, Wen-jong; Cheng, Ying-chou; Chang, Pei-zen; Chen, Ping-hei; Lee, Chih-kung; Dai, Ching-liang; 楊龍杰; Yang, Lung-jieh; Yen, Kaih-siang; Xiao, Fu-yuan; Liu, Chih-wei; Lu, Shui-shong
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