Faculty and staff

Seminar Paper
Entry Year92
Paper title (chapter)In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor
Name of conferenceProceedings of the 2003 IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, pp.993-1000
Conference starting time2003-05-04
Conference closing time2003-05-08
Year of publication2003
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
sponsorPiscataway: Institute of Electrical and Electronics Engineers (IEEE)
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