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Faculty and staff

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Seminar Paper
Entry Year94
Paper title (chapter)A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
Name of conferenceMicro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Conference starting time2005-01-30
Conference closing time2005-02-03
Year of publication2005
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
sponsorPiscataway: Institute of Electrical and Electronics Engineers (IEEE)
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