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Faculty and staff

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Seminar Paper
Entry Year86
Paper title (chapter)An easy method to control the membrane thickness of a pressure sensor by using the (111)-faced V grooves on (110) silicon wafers
Name of conferenceProceedings of SENSOR 97, A7.31, Nuremberg, Germany, pp.165-170
Conference starting time1997-05-13
Conference closing time1997-05-13
Year of publication1997
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
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