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Faculty and staff

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Seminar Paper
Entry Year88
Paper title (chapter)Micro pressure sensor with submillimeter size by the silicon bulk micromachining
Name of conferenceSPIE's symp. on micromachining and microfabrication v.3876-32
Conference starting time1999-09-20
Conference closing time1999-09-20
Year of publication1999
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
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