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Faculty and staff

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Seminar Paper
Entry Year86
Paper title (chapter)A new method to fabricate the blazed gratings by the anisotropic etching on the(110)silicon wafers
Name of conferenceProceedings of SPIE(symposium of Far East and Pacific rim on smart materials and MEMS), v.3242~02, Adelaide, Australia, pp.46-51
Conference starting time1997-11-10
Conference closing time1997-11-10
Year of publication1997
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
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