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Faculty and staff

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Seminar Paper
Entry Year93
Paper title (chapter)A new method of anti-stiction for parylene MEMS process
Name of conferenceInternational Conference on Electrical Engineering 2004 joined with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, Sapporo, Japan, pp.563-567
Conference starting time2004-07-01
Conference closing time2004-07-01
Year of publication2004
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
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