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Seminar Paper
Entry Year95
Paper title (chapter)Design and fabrication of a diaphragm type thermo-buckled microactuators
Name of conferenceNano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference starting time2006-01-18
Conference closing time2006-01-21
Year of publication2006
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
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