年度85
論文名稱Surface roughness of (110) orientation silicon base micro heat exchanger channel
會議名稱7th international conterence on metrology and properties of engineering surfaces
會議開始時間1997-04-02
全部作者Kang, Shung-wen; Chen, J. S.; Hung, J. Y.; Liu, W. C.
備註會議論文