年度85
論文名稱An easy method to control the membrane thickness of a pressure sensor by using the (111)-faced V grooves on (110) silicon wafers
會議名稱Proceedings of SENSOR 97, A7.31, Nuremberg, Germany, pp.165-170
會議開始時間1997-05-13
全部作者楊龍杰; Yang, Lung-jieh; Chang, P. Z.
備註會議論文