年度86
論文名稱A new method to fabricate the blazed gratings by the anisotropic etching on the(110)silicon wafers
會議名稱Proceedings of SPIE(symposium of Far East and Pacific rim on smart materials and MEMS), v.3242~02, Adelaide, Australia, pp.46-51
會議開始時間1997-11-10
全部作者楊龍杰; Yang, Lung-jieh; Chang, P. Z.; Lee, C. K.; Teng, J. T.
備註會議論文