年度92
論文名稱A new method of anti-stiction for parylene MEMS process
會議名稱International Conference on Electrical Engineering 2004 joined with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, Sapporo, Japan, pp.563-567
會議開始時間2004-07-01
全部作者楊龍杰; Yang, Lung-jieh; Wang, Juin-min; Lin, Hung-hua
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