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年度95
論文名稱SU-8 buckled-type microvalves switched by surface tension forces
會議名稱Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.105-108
會議開始時間2007-01-16
全部作者Yang, Lung-jieh; Liu, Kuan-chun
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