年度94
論文名稱Design and fabrication of a diaphragm type thermo-buckled microactuators
會議名稱Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
會議開始時間2006-01-18
全部作者Wang, Jiun-Min; Lin, Hung-Hua; Lin, Yue-Jheng; Ou, Yu-Cheng; Yang, Lung-Jieh; Lin, Chii-Wann; Yang, Yao-Joe; Lin, Wei-Chih
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