年度93
論文名稱A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
會議名稱Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on, pp.500-503
會議開始時間2005-01-30
全部作者Lin, Wei-chih; Liang, Chao-chiun; Tsai, Ching-hsiang; Hsieh, Gen-wen; 楊龍杰; Yang, Lung-jieh
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