年度94
論文名稱Micro Pressure Sensors of 50 μm Size Fabricated by a Standard CMOS Foundry and a Novel Post Process
會議名稱Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, pp.578-581
會議開始時間2006-01-22
全部作者Wang, Hsin-hsiung; Hsu, Chun-wei; Liao, Wei-hao; 楊龍杰; Yang, Lung-jieh; Dai, Ching-liang
備註會議論文