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Faculty and staff

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Seminar Paper
Entry Year95
Paper title (chapter)Micro Pressure Sensors of 50 μm Size Fabricated by a Standard CMOS Foundry and a Novel Post Process
Name of conferenceMicro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference starting time2006-01-22
Conference closing time2006-01-26
Year of publication2006
Name of author (Chinese)Lung-Jieh Yang
Name of author (English)Lung-Jieh Yang
sponsorPiscataway: Institute of Electrical and Electronics Engineers (IEEE)
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